YIN, Min. Predictive Maintenance of Semiconductor Equipment Using Stacking Classifiers and Explainable AI: A Synthetic Data Approach for Fault Detection and Severity Classification. Journal of Industrial Engineering and Applied Science, London, U.K., v. 3, n. 6, p. 36–46, 2025. DOI: 10.70393/6a69656173.333439. Disponível em: https://www.suaspress.org/ojs/index.php/JIEAS/article/view/v3n6a06. Acesso em: 20 dec. 2025.